气浮测量装置精密大理石平台的研磨方法

 张霞峰,刘强,姚建华,刘浩

(广东工业大学 机电工程学院,广东 广州 510006)
摘要:气浮测量装置属于二自由度龙门式测量装置。运动滑块装配在花岗岩大理石导轨上,滑块内装有多孔质气浮轴承,气体通过空气过滤器和精密减压阀提供给气浮轴承保证滑块在导轨上基本无摩擦运行。气浮测量装置安装在精密花岗岩大理石平台上。研磨过的大理石平台平面度和光洁度达不到测量和装配要求,为了进一步提高大理石平面的精度,对大理石平面进行再次研磨。研磨前要进行研磨平板、磨料、研磨液和电子水平仪的选型,实验中用电子水平仪进行平面度的反复测量和用研磨平板进行反复研磨。测量结果显示的大理石平面度的精度较研磨前有明显提高。
关键词:大理石平台;研磨和测量;平面度;表面光洁度
中图分类号:TG84 文献标志码:A doi:10.3969/j.issn.1006-0316.2016.10.014
文章编号:1006-0316 (2016) 10-0055-04
The Method of Grinding Precision Marble Platform of Air Flotation Measured Device 
ZHANG Xiafeng,LIU Qiang,YAO Jianhua,LIU Hao
( School of Mechanical and Electrical Engineering, Guangdong University of Technology, Guanghzhou 510006, China )
Abstract:Flotation measured device belongs to gantry measured device of two degrees of freedom. Motion of the slide mounted on granite marble rail, porous air bearings were installed in the slider. Through the air filters and precision valves, the gas supplied to the air bearings to ensure slide on the rail is substantially frictionless running. Flotation precision measured device was placed on marble platform, the flatness and smoothness of polished marble in the firm was not reach the measured device requirements, in order to further improve the accuracy of measurement and the assembly accuracy of marble device, grind marble platform once more. To select grinding plate, abrasive, grinding fluid and electronic level before grinding marble platform, repeated measurement platform flatness with electronic level and repeated grinding platform with grinding plate in the experiment. The measurement results show that the accuracy of marble flatness significantly improve than before. 
Key words:marble platform;grind and measurement;flatness;surface roughness
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收稿日期:2016-05-16
基金项目:纳米数控装备及纳米加工技术创新团队(项目编号:201001G0104781202)
作者简介:张霞峰(1989-),男,河南商丘人,硕士研究生,主要从事微纳加工技术的研究。
 

 

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