基于微位移平台的辊筒模具表面微结构在位测量方法
段彬，孟松涛，陈威，彭昆
（广东工业大学 机电工程学院，广东 广州 510006）
摘要：辊对辊压花工艺中，具有功能性微结构图案的金属辊模是关键部件，因为功能性微结构图案的表面质量和精度将直接反映在光学膜上。因此，对辊模具表面微结构的轮廓测量显得尤为重要。但是，离线测量后想要进行补偿加工会引入装夹误差，对于一些大型辊筒模具而言不便于拆装且很难有相应的测量仪器。本文提出了一种基于微位移平台的辊筒模具表面微结构在位测量方法。建立了测量原理的数学模型，以消除机床导轨直线度误差和微位移平台系统误差的影响，减少传感器漂移的影响。分析了在实际测量中测量系统的不确定性，并通过仿真分析了该方法的可行性。对微位移平台的性能进行了测试且对测量系统的稳定性进行了测试。最后，实现了辊筒表面结构的在位测量。
关键词：误差分离；轮廓重构；微位移平台
中图分类号：TH133.35 文献标志码：A doi：10.3969/j.issn.1006-0316.2021.11.010
文章编号：1006－0316 (2021) 11－0072－09
On-Machine Measurement Method of Surface Micro-Structure of Roll MoldBased on Micro-Stage Platform
DUAN Bin，MENG Songtao，CHEN Wei，PENG Kun
( School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China )
Abstract：In roll-to-roll embossing process, the roller mold with functional microstructure pattern is the key component, because the surface quality and accuracy of the functional microstructure pattern will be directly reflected on the optical film. Therefore, it is very important to measure the surface microstructure of the roller mold. However, the compensation processing after the off-line measurement will lead to clamping error. For some large roller molds, it is not easy to disassemble and assemble, and it is difficult to have corresponding measuring instruments. In this paper, an on-machine measurement method for the surface microstructure of roller mold based on micro-stage platform is proposed. The mathematical model of the measurement principle is established to eliminate the influence of the straightness error of the machine tool guide rail and the system error of the micro-stage platform, and reduce the influence of the sensor drift. The uncertainty of the measurement system in actual measurement is analyzed, and the feasibility of this method is analyzed by simulation. The performance of the micro-stage platform and the stability of the measurement system are tested. Finally, the on-machine measurement of roller surface structure is realized.
Key words：error separation；contour reconstruction；micro-stage platform
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收稿日期：2021－03－05
基金项目：广州市科技计划重点项目（201810220040）
作者简介：段彬（1995－），男，湖南衡阳人，硕士研究生，主要研究方向为精密测量，E-mail：2997376408@qq.com。
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